2/17/2010	9:02:04 AM	Program exited cleanly
2/17/2010	9:03:49 AM	Program started normally
2/17/2010	9:03:49 AM	Helium valve closed
2/17/2010	9:03:49 AM	H2 valve closed
2/17/2010	9:03:49 AM	BCl3 valve closed
2/17/2010	9:03:49 AM	PH3 valve closed
2/17/2010	9:03:49 AM	SiCl4 pre valve closed
2/17/2010	9:03:49 AM	SiCl4 post valve closed
2/17/2010	9:03:49 AM	Main Vac valve closed
2/17/2010	9:03:49 AM	Bypass valve closed
2/17/2010	9:03:49 AM	Bubbler valve closed
2/17/2010	9:03:49 AM	Helium MFC set to  0.000000
2/17/2010	9:03:49 AM	H2 MFC set to  0.000000
2/17/2010	9:03:49 AM	BCl3 MFC set to  0.000000
2/17/2010	9:03:49 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:03:49 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:03:49 AM	Tube furnace set to 0
2/17/2010	9:03:49 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:03:53 AM	Program exited cleanly
2/17/2010	9:33:38 AM	Program started normally
2/17/2010	9:33:38 AM	Helium valve closed
2/17/2010	9:33:38 AM	H2 valve closed
2/17/2010	9:33:38 AM	BCl3 valve closed
2/17/2010	9:33:38 AM	PH3 valve closed
2/17/2010	9:33:38 AM	SiCl4 pre valve closed
2/17/2010	9:33:38 AM	SiCl4 post valve closed
2/17/2010	9:33:38 AM	Main Vac valve closed
2/17/2010	9:33:38 AM	Bypass valve closed
2/17/2010	9:33:38 AM	Bubbler valve closed
2/17/2010	9:33:38 AM	Helium MFC set to  0.000000
2/17/2010	9:33:38 AM	H2 MFC set to  0.000000
2/17/2010	9:33:38 AM	BCl3 MFC set to  0.000000
2/17/2010	9:33:38 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:33:38 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:33:38 AM	Tube furnace set to 0
2/17/2010	9:33:38 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:33:40 AM	Bypass valve opened
2/17/2010	9:33:40 AM	Bypass valve closed
2/17/2010	9:33:41 AM	Main Vac valve opened
2/17/2010	9:33:41 AM	Main Vac valve closed
2/17/2010	9:33:45 AM	Helium valve opened
2/17/2010	9:33:48 AM	Helium MFC set to  500.000000
2/17/2010	9:33:54 AM	Helium valve closed
2/17/2010	9:34:00 AM	Program exited cleanly
2/17/2010	9:34:34 AM	Program started normally
2/17/2010	9:34:34 AM	Helium valve closed
2/17/2010	9:34:34 AM	H2 valve closed
2/17/2010	9:34:34 AM	BCl3 valve closed
2/17/2010	9:34:34 AM	PH3 valve closed
2/17/2010	9:34:34 AM	SiCl4 pre valve closed
2/17/2010	9:34:34 AM	SiCl4 post valve closed
2/17/2010	9:34:34 AM	Main Vac valve closed
2/17/2010	9:34:34 AM	Bypass valve closed
2/17/2010	9:34:34 AM	Bubbler valve closed
2/17/2010	9:34:34 AM	Helium MFC set to  0.000000
2/17/2010	9:34:34 AM	H2 MFC set to  0.000000
2/17/2010	9:34:34 AM	BCl3 MFC set to  0.000000
2/17/2010	9:34:34 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:34:34 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:34:34 AM	Tube furnace set to 0
2/17/2010	9:34:34 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:34:38 AM	Helium MFC set to  500.000000
2/17/2010	9:34:43 AM	Helium valve opened
2/17/2010	9:36:12 AM	Helium valve closed
2/17/2010	9:36:12 AM	H2 valve closed
2/17/2010	9:36:12 AM	BCl3 valve closed
2/17/2010	9:36:12 AM	PH3 valve closed
2/17/2010	9:36:12 AM	SiCl4 pre valve closed
2/17/2010	9:36:12 AM	SiCl4 post valve closed
2/17/2010	9:36:12 AM	Main Vac valve closed
2/17/2010	9:36:12 AM	Bubbler valve closed
2/17/2010	9:36:12 AM	Bypass valve opened
2/17/2010	9:36:12 AM	Helium MFC set to  0.000000
2/17/2010	9:36:12 AM	H2 MFC set to  0.000000
2/17/2010	9:36:12 AM	BCl3 MFC set to  0.000000
2/17/2010	9:36:12 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:36:12 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:36:12 AM	Tube furnace set to 0
2/17/2010	9:36:12 AM	Baratron reads 900.567492 Torr.  Emergency exit.
2/17/2010	9:36:20 AM	Baratron reads 900.567492 Torr.  Emergency exit.
2/17/2010	9:36:21 AM	Program exited cleanly
2/17/2010	9:36:42 AM	Program started normally
2/17/2010	9:36:42 AM	Helium valve closed
2/17/2010	9:36:42 AM	H2 valve closed
2/17/2010	9:36:42 AM	BCl3 valve closed
2/17/2010	9:36:42 AM	PH3 valve closed
2/17/2010	9:36:42 AM	SiCl4 pre valve closed
2/17/2010	9:36:42 AM	SiCl4 post valve closed
2/17/2010	9:36:42 AM	Main Vac valve closed
2/17/2010	9:36:42 AM	Bypass valve closed
2/17/2010	9:36:42 AM	Bubbler valve closed
2/17/2010	9:36:42 AM	Helium MFC set to  0.000000
2/17/2010	9:36:42 AM	H2 MFC set to  0.000000
2/17/2010	9:36:42 AM	BCl3 MFC set to  0.000000
2/17/2010	9:36:42 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:36:42 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:36:42 AM	Tube furnace set to 0
2/17/2010	9:36:42 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:42:31 AM	Program started after a nonstandard shutdown
2/17/2010	9:42:31 AM	Helium valve closed
2/17/2010	9:42:31 AM	H2 valve closed
2/17/2010	9:42:31 AM	BCl3 valve closed
2/17/2010	9:42:31 AM	PH3 valve closed
2/17/2010	9:42:31 AM	SiCl4 pre valve closed
2/17/2010	9:42:31 AM	SiCl4 post valve closed
2/17/2010	9:42:31 AM	Main Vac valve closed
2/17/2010	9:42:31 AM	Bypass valve closed
2/17/2010	9:42:31 AM	Bubbler valve closed
2/17/2010	9:42:31 AM	Helium MFC set to  0.000000
2/17/2010	9:42:31 AM	H2 MFC set to  0.000000
2/17/2010	9:42:31 AM	BCl3 MFC set to  0.000000
2/17/2010	9:42:31 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:42:31 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:42:31 AM	Tube furnace set to 0
2/17/2010	9:42:31 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:48:32 AM	Recipe started at 9:48 AM
2/17/2010	9:48:32 AM	H2 valve closed
2/17/2010	9:48:32 AM	BCl3 valve closed
2/17/2010	9:48:32 AM	PH3 valve closed
2/17/2010	9:48:32 AM	SiCl4 pre valve closed
2/17/2010	9:48:32 AM	SiCl4 post valve closed
2/17/2010	9:48:32 AM	Main Vac valve closed
2/17/2010	9:48:32 AM	Bypass valve closed
2/17/2010	9:48:32 AM	Bubbler valve closed
2/17/2010	9:48:32 AM	Helium valve opened
2/17/2010	9:48:32 AM	Helium MFC set to  500.000000
2/17/2010	9:48:32 AM	H2 MFC set to  0.000000
2/17/2010	9:48:32 AM	BCl3 MFC set to  0.000000
2/17/2010	9:48:32 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:48:32 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	9:48:32 AM	Tube furnace set to 0
2/17/2010	9:48:32 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	9:50:05 AM	Helium valve closed
2/17/2010	9:50:05 AM	H2 valve closed
2/17/2010	9:50:05 AM	BCl3 valve closed
2/17/2010	9:50:05 AM	PH3 valve closed
2/17/2010	9:50:05 AM	SiCl4 pre valve closed
2/17/2010	9:50:05 AM	SiCl4 post valve closed
2/17/2010	9:50:05 AM	Main Vac valve closed
2/17/2010	9:50:05 AM	Bubbler valve closed
2/17/2010	9:50:05 AM	Bypass valve opened
2/17/2010	9:50:05 AM	Helium MFC set to  0.000000
2/17/2010	9:50:05 AM	H2 MFC set to  0.000000
2/17/2010	9:50:05 AM	BCl3 MFC set to  0.000000
2/17/2010	9:50:05 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:50:05 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:50:05 AM	Tube furnace set to 0
2/17/2010	9:50:05 AM	Baratron reads 901.588320 Torr.  Emergency exit.
2/17/2010	9:50:08 AM	Run aborted at 9:50 AM
2/17/2010	9:50:16 AM	Program started after a nonstandard shutdown
2/17/2010	9:50:16 AM	Helium valve closed
2/17/2010	9:50:16 AM	H2 valve closed
2/17/2010	9:50:16 AM	BCl3 valve closed
2/17/2010	9:50:16 AM	PH3 valve closed
2/17/2010	9:50:16 AM	SiCl4 pre valve closed
2/17/2010	9:50:16 AM	SiCl4 post valve closed
2/17/2010	9:50:16 AM	Main Vac valve closed
2/17/2010	9:50:16 AM	Bypass valve closed
2/17/2010	9:50:16 AM	Bubbler valve closed
2/17/2010	9:50:16 AM	Helium MFC set to  0.000000
2/17/2010	9:50:16 AM	H2 MFC set to  0.000000
2/17/2010	9:50:16 AM	BCl3 MFC set to  0.000000
2/17/2010	9:50:16 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:50:16 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:50:16 AM	Tube furnace set to 0
2/17/2010	9:50:16 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:50:40 AM	Recipe started at 9:50 AM
2/17/2010	9:50:40 AM	H2 valve closed
2/17/2010	9:50:40 AM	BCl3 valve closed
2/17/2010	9:50:40 AM	PH3 valve closed
2/17/2010	9:50:40 AM	SiCl4 pre valve closed
2/17/2010	9:50:40 AM	SiCl4 post valve closed
2/17/2010	9:50:40 AM	Main Vac valve closed
2/17/2010	9:50:40 AM	Bypass valve closed
2/17/2010	9:50:40 AM	Bubbler valve closed
2/17/2010	9:50:40 AM	Helium valve opened
2/17/2010	9:50:40 AM	Helium MFC set to  500.000000
2/17/2010	9:50:40 AM	H2 MFC set to  0.000000
2/17/2010	9:50:40 AM	BCl3 MFC set to  0.000000
2/17/2010	9:50:40 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:50:40 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	9:50:40 AM	Tube furnace set to 0
2/17/2010	9:50:40 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	9:51:19 AM	Program started after a nonstandard shutdown
2/17/2010	9:51:19 AM	Helium valve closed
2/17/2010	9:51:19 AM	H2 valve closed
2/17/2010	9:51:19 AM	BCl3 valve closed
2/17/2010	9:51:19 AM	PH3 valve closed
2/17/2010	9:51:19 AM	SiCl4 pre valve closed
2/17/2010	9:51:19 AM	SiCl4 post valve closed
2/17/2010	9:51:19 AM	Main Vac valve closed
2/17/2010	9:51:19 AM	Bypass valve closed
2/17/2010	9:51:19 AM	Bubbler valve closed
2/17/2010	9:51:19 AM	Helium MFC set to  0.000000
2/17/2010	9:51:19 AM	H2 MFC set to  0.000000
2/17/2010	9:51:19 AM	BCl3 MFC set to  0.000000
2/17/2010	9:51:19 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:51:19 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:51:19 AM	Tube furnace set to 0
2/17/2010	9:51:19 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:52:02 AM	Recipe started at 9:52 AM
2/17/2010	9:52:02 AM	H2 valve closed
2/17/2010	9:52:02 AM	BCl3 valve closed
2/17/2010	9:52:02 AM	PH3 valve closed
2/17/2010	9:52:02 AM	SiCl4 pre valve closed
2/17/2010	9:52:02 AM	SiCl4 post valve closed
2/17/2010	9:52:02 AM	Main Vac valve closed
2/17/2010	9:52:02 AM	Bypass valve closed
2/17/2010	9:52:02 AM	Bubbler valve closed
2/17/2010	9:52:02 AM	Helium valve opened
2/17/2010	9:52:02 AM	Helium MFC set to  500.000000
2/17/2010	9:52:02 AM	H2 MFC set to  0.000000
2/17/2010	9:52:02 AM	BCl3 MFC set to  0.000000
2/17/2010	9:52:02 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:52:02 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	9:52:02 AM	Tube furnace set to 0
2/17/2010	9:52:02 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	9:52:42 AM	Helium valve closed
2/17/2010	9:52:42 AM	H2 valve closed
2/17/2010	9:52:42 AM	BCl3 valve closed
2/17/2010	9:52:42 AM	PH3 valve closed
2/17/2010	9:52:42 AM	SiCl4 pre valve closed
2/17/2010	9:52:42 AM	SiCl4 post valve closed
2/17/2010	9:52:42 AM	Main Vac valve closed
2/17/2010	9:52:42 AM	Bubbler valve closed
2/17/2010	9:52:42 AM	Bypass valve opened
2/17/2010	9:52:42 AM	Helium MFC set to  0.000000
2/17/2010	9:52:42 AM	H2 MFC set to  0.000000
2/17/2010	9:52:42 AM	BCl3 MFC set to  0.000000
2/17/2010	9:52:42 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:52:42 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:52:42 AM	Tube furnace set to 0
2/17/2010	9:52:42 AM	Baratron reads 901.588320 Torr.  Emergency exit.
2/17/2010	9:52:45 AM	Run aborted at 9:52 AM
2/17/2010	9:52:49 AM	Program started after a nonstandard shutdown
2/17/2010	9:52:49 AM	Helium valve closed
2/17/2010	9:52:49 AM	H2 valve closed
2/17/2010	9:52:49 AM	BCl3 valve closed
2/17/2010	9:52:49 AM	PH3 valve closed
2/17/2010	9:52:49 AM	SiCl4 pre valve closed
2/17/2010	9:52:49 AM	SiCl4 post valve closed
2/17/2010	9:52:49 AM	Main Vac valve closed
2/17/2010	9:52:49 AM	Bypass valve closed
2/17/2010	9:52:49 AM	Bubbler valve closed
2/17/2010	9:52:49 AM	Helium MFC set to  0.000000
2/17/2010	9:52:49 AM	H2 MFC set to  0.000000
2/17/2010	9:52:49 AM	BCl3 MFC set to  0.000000
2/17/2010	9:52:49 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:52:49 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:52:49 AM	Tube furnace set to 0
2/17/2010	9:52:49 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:54:51 AM	Program started after a nonstandard shutdown
2/17/2010	9:54:51 AM	Helium valve closed
2/17/2010	9:54:51 AM	H2 valve closed
2/17/2010	9:54:51 AM	BCl3 valve closed
2/17/2010	9:54:51 AM	PH3 valve closed
2/17/2010	9:54:51 AM	SiCl4 pre valve closed
2/17/2010	9:54:51 AM	SiCl4 post valve closed
2/17/2010	9:54:51 AM	Main Vac valve closed
2/17/2010	9:54:51 AM	Bypass valve closed
2/17/2010	9:54:51 AM	Bubbler valve closed
2/17/2010	9:54:51 AM	Helium MFC set to  0.000000
2/17/2010	9:54:51 AM	H2 MFC set to  0.000000
2/17/2010	9:54:51 AM	BCl3 MFC set to  0.000000
2/17/2010	9:54:51 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:54:51 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:54:51 AM	Tube furnace set to 0
2/17/2010	9:54:51 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:55:03 AM	Recipe started at 9:55 AM
2/17/2010	9:55:03 AM	H2 valve closed
2/17/2010	9:55:03 AM	BCl3 valve closed
2/17/2010	9:55:03 AM	PH3 valve closed
2/17/2010	9:55:03 AM	SiCl4 pre valve closed
2/17/2010	9:55:03 AM	SiCl4 post valve closed
2/17/2010	9:55:03 AM	Main Vac valve closed
2/17/2010	9:55:03 AM	Bypass valve closed
2/17/2010	9:55:03 AM	Bubbler valve closed
2/17/2010	9:55:03 AM	Helium valve opened
2/17/2010	9:55:03 AM	Helium MFC set to  500.000000
2/17/2010	9:55:03 AM	H2 MFC set to  0.000000
2/17/2010	9:55:03 AM	BCl3 MFC set to  0.000000
2/17/2010	9:55:03 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:55:03 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	9:55:03 AM	Tube furnace set to 0
2/17/2010	9:55:03 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	9:56:14 AM	Helium valve closed
2/17/2010	9:56:14 AM	H2 valve closed
2/17/2010	9:56:14 AM	BCl3 valve closed
2/17/2010	9:56:14 AM	PH3 valve closed
2/17/2010	9:56:14 AM	SiCl4 pre valve closed
2/17/2010	9:56:14 AM	SiCl4 post valve closed
2/17/2010	9:56:14 AM	Main Vac valve closed
2/17/2010	9:56:14 AM	Bubbler valve closed
2/17/2010	9:56:14 AM	Bypass valve opened
2/17/2010	9:56:14 AM	Helium MFC set to  0.000000
2/17/2010	9:56:14 AM	H2 MFC set to  0.000000
2/17/2010	9:56:14 AM	BCl3 MFC set to  0.000000
2/17/2010	9:56:14 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:56:14 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:56:14 AM	Tube furnace set to 0
2/17/2010	9:56:14 AM	Baratron reads 900.567492 Torr.  Emergency exit.
2/17/2010	9:56:16 AM	Run aborted at 9:56 AM
2/17/2010	9:56:20 AM	Program exited cleanly
2/17/2010	9:56:22 AM	Program started normally
2/17/2010	9:56:22 AM	Helium valve closed
2/17/2010	9:56:22 AM	H2 valve closed
2/17/2010	9:56:22 AM	BCl3 valve closed
2/17/2010	9:56:22 AM	PH3 valve closed
2/17/2010	9:56:22 AM	SiCl4 pre valve closed
2/17/2010	9:56:22 AM	SiCl4 post valve closed
2/17/2010	9:56:22 AM	Main Vac valve closed
2/17/2010	9:56:22 AM	Bypass valve closed
2/17/2010	9:56:22 AM	Bubbler valve closed
2/17/2010	9:56:22 AM	Helium MFC set to  0.000000
2/17/2010	9:56:22 AM	H2 MFC set to  0.000000
2/17/2010	9:56:22 AM	BCl3 MFC set to  0.000000
2/17/2010	9:56:22 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:56:22 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:56:22 AM	Tube furnace set to 0
2/17/2010	9:56:22 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:56:26 AM	Program exited cleanly
2/17/2010	9:56:57 AM	Program started normally
2/17/2010	9:56:57 AM	Helium valve closed
2/17/2010	9:56:57 AM	H2 valve closed
2/17/2010	9:56:57 AM	BCl3 valve closed
2/17/2010	9:56:57 AM	PH3 valve closed
2/17/2010	9:56:57 AM	SiCl4 pre valve closed
2/17/2010	9:56:57 AM	SiCl4 post valve closed
2/17/2010	9:56:57 AM	Main Vac valve closed
2/17/2010	9:56:57 AM	Bypass valve closed
2/17/2010	9:56:57 AM	Bubbler valve closed
2/17/2010	9:56:57 AM	Helium MFC set to  0.000000
2/17/2010	9:56:57 AM	H2 MFC set to  0.000000
2/17/2010	9:56:57 AM	BCl3 MFC set to  0.000000
2/17/2010	9:56:57 AM	SiCl4 MFC set to  0.000000
2/17/2010	9:56:57 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	9:56:57 AM	Tube furnace set to 0
2/17/2010	9:56:57 AM	Bypass solenoid MFC set to  760.000000
2/17/2010	10:23:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2010	10:23:36 AM	H2 valve closed
2/17/2010	10:23:36 AM	BCl3 valve closed
2/17/2010	10:23:36 AM	PH3 valve closed
2/17/2010	10:23:36 AM	SiCl4 pre valve closed
2/17/2010	10:23:36 AM	SiCl4 post valve closed
2/17/2010	10:23:36 AM	Main Vac valve closed
2/17/2010	10:23:36 AM	Bypass valve closed
2/17/2010	10:23:36 AM	Bubbler valve closed
2/17/2010	10:23:36 AM	Helium valve opened
2/17/2010	10:23:36 AM	Helium MFC set to  500.000000
2/17/2010	10:23:36 AM	H2 MFC set to  0.000000
2/17/2010	10:23:36 AM	BCl3 MFC set to  0.000000
2/17/2010	10:23:36 AM	SiCl4 MFC set to  0.000000
2/17/2010	10:23:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:23:36 AM	Tube furnace set to 0
2/17/2010	10:23:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:24:36 AM	Helium valve closed
2/17/2010	10:24:36 AM	H2 valve closed
2/17/2010	10:24:36 AM	BCl3 valve closed
2/17/2010	10:24:36 AM	PH3 valve closed
2/17/2010	10:24:36 AM	SiCl4 pre valve closed
2/17/2010	10:24:36 AM	SiCl4 post valve closed
2/17/2010	10:24:36 AM	Main Vac valve closed
2/17/2010	10:24:36 AM	Bypass valve closed
2/17/2010	10:24:36 AM	Bubbler valve closed
2/17/2010	10:24:36 AM	Helium MFC set to  0.000000
2/17/2010	10:24:36 AM	H2 MFC set to  0.000000
2/17/2010	10:24:36 AM	BCl3 MFC set to  0.000000
2/17/2010	10:24:36 AM	SiCl4 MFC set to  0.000000
2/17/2010	10:24:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:24:36 AM	Tube furnace set to 0
2/17/2010	10:24:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:24:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2010	10:31:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2010	10:31:56 AM	Helium valve closed
2/17/2010	10:31:56 AM	H2 valve closed
2/17/2010	10:31:56 AM	BCl3 valve closed
2/17/2010	10:31:56 AM	PH3 valve closed
2/17/2010	10:31:56 AM	SiCl4 pre valve closed
2/17/2010	10:31:56 AM	SiCl4 post valve closed
2/17/2010	10:31:56 AM	Main Vac valve closed
2/17/2010	10:31:56 AM	Bubbler valve closed
2/17/2010	10:31:56 AM	Bypass valve opened
2/17/2010	10:31:56 AM	Helium MFC set to  0.000000
2/17/2010	10:31:56 AM	H2 MFC set to  0.000000
2/17/2010	10:31:56 AM	BCl3 MFC set to  0.000000
2/17/2010	10:31:56 AM	SiCl4 MFC set to  0.000000
2/17/2010	10:31:56 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:31:56 AM	Tube furnace set to 0
2/17/2010	10:31:56 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:32:26 AM	Helium valve closed
2/17/2010	10:32:26 AM	H2 valve closed
2/17/2010	10:32:26 AM	BCl3 valve closed
2/17/2010	10:32:26 AM	PH3 valve closed
2/17/2010	10:32:26 AM	SiCl4 pre valve closed
2/17/2010	10:32:26 AM	SiCl4 post valve closed
2/17/2010	10:32:26 AM	Bubbler valve closed
2/17/2010	10:32:26 AM	Main Vac valve opened
2/17/2010	10:32:26 AM	Bypass valve opened
2/17/2010	10:32:26 AM	Helium MFC set to  0.000000
2/17/2010	10:32:26 AM	H2 MFC set to  0.000000
2/17/2010	10:32:26 AM	BCl3 MFC set to  0.000000
2/17/2010	10:32:26 AM	SiCl4 MFC set to  0.000000
2/17/2010	10:32:26 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:32:26 AM	Tube furnace set to 0
2/17/2010	10:32:26 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:32:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2010	10:33:33 AM	Bypass valve closed
2/17/2010	10:33:34 AM	Main Vac valve closed
2/17/2010	10:33:44 AM	Bypass valve opened
2/17/2010	10:33:44 AM	Main Vac valve opened
2/17/2010	10:33:45 AM	Helium valve opened
2/17/2010	10:33:50 AM	Helium MFC set to  100.000000
2/17/2010	10:37:20 AM	Helium valve closed
2/17/2010	10:39:16 AM	Bypass valve closed
2/17/2010	10:39:16 AM	Main Vac valve closed
2/17/2010	10:39:24 AM	Bypass valve opened
2/17/2010	10:39:24 AM	Main Vac valve opened
2/17/2010	10:41:19 AM	Recipe started at 10:41 AM
2/17/2010	10:41:19 AM	Helium valve closed
2/17/2010	10:41:19 AM	BCl3 valve closed
2/17/2010	10:41:19 AM	PH3 valve closed
2/17/2010	10:41:19 AM	SiCl4 pre valve closed
2/17/2010	10:41:19 AM	SiCl4 post valve closed
2/17/2010	10:41:19 AM	Main Vac valve closed
2/17/2010	10:41:19 AM	Bypass valve closed
2/17/2010	10:41:19 AM	Bubbler valve closed
2/17/2010	10:41:19 AM	H2 valve opened
2/17/2010	10:41:19 AM	Helium MFC set to  0.000000
2/17/2010	10:41:19 AM	H2 MFC set to  500.000000
2/17/2010	10:41:19 AM	BCl3 MFC set to  0.000000
2/17/2010	10:41:19 AM	SiCl4 MFC set to  0.000000
2/17/2010	10:41:19 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:41:19 AM	Tube furnace set to 0
2/17/2010	10:41:19 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:42:40 AM	Helium valve closed
2/17/2010	10:42:40 AM	BCl3 valve closed
2/17/2010	10:42:40 AM	PH3 valve closed
2/17/2010	10:42:40 AM	SiCl4 pre valve closed
2/17/2010	10:42:40 AM	SiCl4 post valve closed
2/17/2010	10:42:40 AM	Main Vac valve closed
2/17/2010	10:42:40 AM	Bypass valve closed
2/17/2010	10:42:40 AM	H2 valve opened
2/17/2010	10:42:40 AM	Bubbler valve opened
2/17/2010	10:42:40 AM	Helium MFC set to  0.000000
2/17/2010	10:42:40 AM	H2 MFC set to  500.000000
2/17/2010	10:42:40 AM	BCl3 MFC set to  0.000000
2/17/2010	10:42:40 AM	SiCl4 MFC set to  0.000000
2/17/2010	10:42:40 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	10:42:40 AM	Tube furnace set to 0
2/17/2010	10:42:40 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:02:40 AM	Helium valve closed
2/17/2010	11:02:40 AM	BCl3 valve closed
2/17/2010	11:02:40 AM	PH3 valve closed
2/17/2010	11:02:40 AM	Main Vac valve closed
2/17/2010	11:02:40 AM	Bypass valve closed
2/17/2010	11:02:40 AM	H2 valve opened
2/17/2010	11:02:40 AM	SiCl4 pre valve opened
2/17/2010	11:02:40 AM	SiCl4 post valve opened
2/17/2010	11:02:40 AM	Bubbler valve opened
2/17/2010	11:02:40 AM	Helium MFC set to  0.000000
2/17/2010	11:02:40 AM	H2 MFC set to  500.000000
2/17/2010	11:02:40 AM	BCl3 MFC set to  0.000000
2/17/2010	11:02:40 AM	SiCl4 MFC set to  325.000000
2/17/2010	11:02:40 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:02:40 AM	Tube furnace set to 0
2/17/2010	11:02:40 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:22:41 AM	H2 valve closed
2/17/2010	11:22:41 AM	BCl3 valve closed
2/17/2010	11:22:41 AM	PH3 valve closed
2/17/2010	11:22:41 AM	SiCl4 pre valve closed
2/17/2010	11:22:41 AM	SiCl4 post valve closed
2/17/2010	11:22:41 AM	Main Vac valve closed
2/17/2010	11:22:41 AM	Bypass valve closed
2/17/2010	11:22:41 AM	Helium valve opened
2/17/2010	11:22:41 AM	Bubbler valve opened
2/17/2010	11:22:41 AM	Helium MFC set to  500.000000
2/17/2010	11:22:41 AM	H2 MFC set to  0.000000
2/17/2010	11:22:41 AM	BCl3 MFC set to  0.000000
2/17/2010	11:22:41 AM	SiCl4 MFC set to  0.000000
2/17/2010	11:22:41 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:22:41 AM	Tube furnace set to 0
2/17/2010	11:22:41 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:42:41 AM	Helium valve closed
2/17/2010	11:42:41 AM	H2 valve closed
2/17/2010	11:42:41 AM	BCl3 valve closed
2/17/2010	11:42:41 AM	PH3 valve closed
2/17/2010	11:42:41 AM	SiCl4 pre valve closed
2/17/2010	11:42:41 AM	SiCl4 post valve closed
2/17/2010	11:42:41 AM	Main Vac valve closed
2/17/2010	11:42:41 AM	Bypass valve closed
2/17/2010	11:42:41 AM	Bubbler valve closed
2/17/2010	11:42:41 AM	Helium MFC set to  0.000000
2/17/2010	11:42:41 AM	H2 MFC set to  0.000000
2/17/2010	11:42:41 AM	BCl3 MFC set to  0.000000
2/17/2010	11:42:41 AM	SiCl4 MFC set to  0.000000
2/17/2010	11:42:41 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:42:41 AM	Tube furnace set to 0
2/17/2010	11:42:41 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:42:42 AM	Run finished at 11:42 AM
2/17/2010	11:50:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2010	11:50:37 AM	Helium valve closed
2/17/2010	11:50:37 AM	H2 valve closed
2/17/2010	11:50:37 AM	BCl3 valve closed
2/17/2010	11:50:37 AM	PH3 valve closed
2/17/2010	11:50:37 AM	SiCl4 pre valve closed
2/17/2010	11:50:37 AM	SiCl4 post valve closed
2/17/2010	11:50:37 AM	Main Vac valve closed
2/17/2010	11:50:37 AM	Bubbler valve closed
2/17/2010	11:50:37 AM	Bypass valve opened
2/17/2010	11:50:37 AM	Helium MFC set to  0.000000
2/17/2010	11:50:37 AM	H2 MFC set to  0.000000
2/17/2010	11:50:37 AM	BCl3 MFC set to  0.000000
2/17/2010	11:50:37 AM	SiCl4 MFC set to  0.000000
2/17/2010	11:50:37 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:50:37 AM	Tube furnace set to 0
2/17/2010	11:50:37 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:51:08 AM	Helium valve closed
2/17/2010	11:51:08 AM	H2 valve closed
2/17/2010	11:51:08 AM	BCl3 valve closed
2/17/2010	11:51:08 AM	PH3 valve closed
2/17/2010	11:51:08 AM	SiCl4 pre valve closed
2/17/2010	11:51:08 AM	SiCl4 post valve closed
2/17/2010	11:51:08 AM	Bubbler valve closed
2/17/2010	11:51:08 AM	Main Vac valve opened
2/17/2010	11:51:08 AM	Bypass valve opened
2/17/2010	11:51:08 AM	Helium MFC set to  0.000000
2/17/2010	11:51:08 AM	H2 MFC set to  0.000000
2/17/2010	11:51:08 AM	BCl3 MFC set to  0.000000
2/17/2010	11:51:08 AM	SiCl4 MFC set to  0.000000
2/17/2010	11:51:08 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:51:08 AM	Tube furnace set to 0
2/17/2010	11:51:08 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:51:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2010	11:51:30 AM	Helium valve opened
2/17/2010	11:51:34 AM	Helium MFC set to  100.000000
2/17/2010	11:55:16 AM	Helium valve closed
2/17/2010	11:55:53 AM	Bypass valve closed
2/17/2010	11:55:53 AM	Main Vac valve closed
2/17/2010	11:56:02 AM	Bypass valve opened
2/17/2010	11:56:03 AM	Main Vac valve opened
2/17/2010	11:56:54 AM	Recipe started at 11:56 AM
2/17/2010	11:56:54 AM	Helium valve closed
2/17/2010	11:56:54 AM	BCl3 valve closed
2/17/2010	11:56:54 AM	PH3 valve closed
2/17/2010	11:56:54 AM	SiCl4 pre valve closed
2/17/2010	11:56:54 AM	SiCl4 post valve closed
2/17/2010	11:56:54 AM	Main Vac valve closed
2/17/2010	11:56:54 AM	Bypass valve closed
2/17/2010	11:56:54 AM	Bubbler valve closed
2/17/2010	11:56:54 AM	H2 valve opened
2/17/2010	11:56:54 AM	Helium MFC set to  0.000000
2/17/2010	11:56:54 AM	H2 MFC set to  500.000000
2/17/2010	11:56:54 AM	BCl3 MFC set to  0.000000
2/17/2010	11:56:54 AM	SiCl4 MFC set to  0.000000
2/17/2010	11:56:54 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:56:54 AM	Tube furnace set to 0
2/17/2010	11:56:54 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:58:14 AM	Helium valve closed
2/17/2010	11:58:14 AM	BCl3 valve closed
2/17/2010	11:58:14 AM	PH3 valve closed
2/17/2010	11:58:14 AM	SiCl4 pre valve closed
2/17/2010	11:58:14 AM	SiCl4 post valve closed
2/17/2010	11:58:14 AM	Main Vac valve closed
2/17/2010	11:58:14 AM	Bypass valve closed
2/17/2010	11:58:14 AM	H2 valve opened
2/17/2010	11:58:14 AM	Bubbler valve opened
2/17/2010	11:58:14 AM	Helium MFC set to  0.000000
2/17/2010	11:58:14 AM	H2 MFC set to  500.000000
2/17/2010	11:58:14 AM	BCl3 MFC set to  0.000000
2/17/2010	11:58:14 AM	SiCl4 MFC set to  0.000000
2/17/2010	11:58:14 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	11:58:14 AM	Tube furnace set to 0
2/17/2010	11:58:14 AM	Bypass solenoid MFC set to  0.000000
2/17/2010	12:18:15 PM	Helium valve closed
2/17/2010	12:18:15 PM	BCl3 valve closed
2/17/2010	12:18:15 PM	PH3 valve closed
2/17/2010	12:18:15 PM	Main Vac valve closed
2/17/2010	12:18:15 PM	Bypass valve closed
2/17/2010	12:18:15 PM	H2 valve opened
2/17/2010	12:18:15 PM	SiCl4 pre valve opened
2/17/2010	12:18:15 PM	SiCl4 post valve opened
2/17/2010	12:18:15 PM	Bubbler valve opened
2/17/2010	12:18:15 PM	Helium MFC set to  0.000000
2/17/2010	12:18:15 PM	H2 MFC set to  500.000000
2/17/2010	12:18:15 PM	BCl3 MFC set to  0.000000
2/17/2010	12:18:15 PM	SiCl4 MFC set to  325.000000
2/17/2010	12:18:15 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	12:18:15 PM	Tube furnace set to 0
2/17/2010	12:18:15 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	12:38:15 PM	H2 valve closed
2/17/2010	12:38:15 PM	BCl3 valve closed
2/17/2010	12:38:15 PM	PH3 valve closed
2/17/2010	12:38:15 PM	SiCl4 pre valve closed
2/17/2010	12:38:15 PM	SiCl4 post valve closed
2/17/2010	12:38:15 PM	Main Vac valve closed
2/17/2010	12:38:15 PM	Bypass valve closed
2/17/2010	12:38:15 PM	Helium valve opened
2/17/2010	12:38:15 PM	Bubbler valve opened
2/17/2010	12:38:15 PM	Helium MFC set to  500.000000
2/17/2010	12:38:15 PM	H2 MFC set to  0.000000
2/17/2010	12:38:15 PM	BCl3 MFC set to  0.000000
2/17/2010	12:38:15 PM	SiCl4 MFC set to  0.000000
2/17/2010	12:38:15 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	12:38:15 PM	Tube furnace set to 0
2/17/2010	12:38:15 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	12:58:16 PM	Helium valve closed
2/17/2010	12:58:16 PM	H2 valve closed
2/17/2010	12:58:16 PM	BCl3 valve closed
2/17/2010	12:58:16 PM	PH3 valve closed
2/17/2010	12:58:16 PM	SiCl4 pre valve closed
2/17/2010	12:58:16 PM	SiCl4 post valve closed
2/17/2010	12:58:16 PM	Main Vac valve closed
2/17/2010	12:58:16 PM	Bypass valve closed
2/17/2010	12:58:16 PM	Bubbler valve closed
2/17/2010	12:58:16 PM	Helium MFC set to  0.000000
2/17/2010	12:58:16 PM	H2 MFC set to  0.000000
2/17/2010	12:58:16 PM	BCl3 MFC set to  0.000000
2/17/2010	12:58:16 PM	SiCl4 MFC set to  0.000000
2/17/2010	12:58:16 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	12:58:16 PM	Tube furnace set to 0
2/17/2010	12:58:16 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	12:58:16 PM	Run finished at 12:58 PM
2/17/2010	12:58:43 PM	Program exited cleanly
2/17/2010	12:59:36 PM	Program started normally
2/17/2010	12:59:36 PM	Helium valve closed
2/17/2010	12:59:36 PM	H2 valve closed
2/17/2010	12:59:36 PM	BCl3 valve closed
2/17/2010	12:59:36 PM	PH3 valve closed
2/17/2010	12:59:36 PM	SiCl4 pre valve closed
2/17/2010	12:59:36 PM	SiCl4 post valve closed
2/17/2010	12:59:36 PM	Main Vac valve closed
2/17/2010	12:59:36 PM	Bypass valve closed
2/17/2010	12:59:36 PM	Bubbler valve closed
2/17/2010	12:59:36 PM	Helium MFC set to  0.000000
2/17/2010	12:59:36 PM	H2 MFC set to  0.000000
2/17/2010	12:59:36 PM	BCl3 MFC set to  0.000000
2/17/2010	12:59:36 PM	SiCl4 MFC set to  0.000000
2/17/2010	12:59:36 PM	Bypass solenoid MFC set to  760.000000
2/17/2010	12:59:36 PM	Tube furnace set to 0
2/17/2010	12:59:36 PM	Bypass solenoid MFC set to  760.000000
2/17/2010	1:01:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2010	1:01:58 PM	Helium valve closed
2/17/2010	1:01:58 PM	H2 valve closed
2/17/2010	1:01:58 PM	BCl3 valve closed
2/17/2010	1:01:58 PM	PH3 valve closed
2/17/2010	1:01:58 PM	SiCl4 pre valve closed
2/17/2010	1:01:58 PM	SiCl4 post valve closed
2/17/2010	1:01:58 PM	Main Vac valve closed
2/17/2010	1:01:58 PM	Bubbler valve closed
2/17/2010	1:01:58 PM	Bypass valve opened
2/17/2010	1:01:58 PM	Helium MFC set to  0.000000
2/17/2010	1:01:58 PM	H2 MFC set to  0.000000
2/17/2010	1:01:58 PM	BCl3 MFC set to  0.000000
2/17/2010	1:01:58 PM	SiCl4 MFC set to  0.000000
2/17/2010	1:01:58 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:01:58 PM	Tube furnace set to 0
2/17/2010	1:01:58 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:02:28 PM	Helium valve closed
2/17/2010	1:02:28 PM	H2 valve closed
2/17/2010	1:02:28 PM	BCl3 valve closed
2/17/2010	1:02:28 PM	PH3 valve closed
2/17/2010	1:02:28 PM	SiCl4 pre valve closed
2/17/2010	1:02:28 PM	SiCl4 post valve closed
2/17/2010	1:02:28 PM	Bubbler valve closed
2/17/2010	1:02:28 PM	Main Vac valve opened
2/17/2010	1:02:28 PM	Bypass valve opened
2/17/2010	1:02:28 PM	Helium MFC set to  0.000000
2/17/2010	1:02:28 PM	H2 MFC set to  0.000000
2/17/2010	1:02:28 PM	BCl3 MFC set to  0.000000
2/17/2010	1:02:28 PM	SiCl4 MFC set to  0.000000
2/17/2010	1:02:28 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:02:28 PM	Tube furnace set to 0
2/17/2010	1:02:28 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:02:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2010	1:03:09 PM	Helium valve opened
2/17/2010	1:03:12 PM	Helium MFC set to  100.000000
2/17/2010	1:04:30 PM	Helium valve closed
2/17/2010	1:05:04 PM	Bypass valve closed
2/17/2010	1:05:04 PM	Main Vac valve closed
2/17/2010	1:05:11 PM	Bypass valve opened
2/17/2010	1:05:11 PM	Main Vac valve opened
2/17/2010	1:06:20 PM	Recipe started at 1:06 PM
2/17/2010	1:06:20 PM	Helium valve closed
2/17/2010	1:06:20 PM	BCl3 valve closed
2/17/2010	1:06:20 PM	PH3 valve closed
2/17/2010	1:06:20 PM	SiCl4 pre valve closed
2/17/2010	1:06:20 PM	SiCl4 post valve closed
2/17/2010	1:06:20 PM	Main Vac valve closed
2/17/2010	1:06:20 PM	Bypass valve closed
2/17/2010	1:06:20 PM	Bubbler valve closed
2/17/2010	1:06:20 PM	H2 valve opened
2/17/2010	1:06:20 PM	Helium MFC set to  0.000000
2/17/2010	1:06:20 PM	H2 MFC set to  500.000000
2/17/2010	1:06:20 PM	BCl3 MFC set to  0.000000
2/17/2010	1:06:20 PM	SiCl4 MFC set to  0.000000
2/17/2010	1:06:20 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:06:20 PM	Tube furnace set to 0
2/17/2010	1:06:20 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:07:38 PM	Helium valve closed
2/17/2010	1:07:38 PM	BCl3 valve closed
2/17/2010	1:07:38 PM	PH3 valve closed
2/17/2010	1:07:38 PM	SiCl4 pre valve closed
2/17/2010	1:07:38 PM	SiCl4 post valve closed
2/17/2010	1:07:38 PM	Main Vac valve closed
2/17/2010	1:07:38 PM	Bypass valve closed
2/17/2010	1:07:38 PM	H2 valve opened
2/17/2010	1:07:38 PM	Bubbler valve opened
2/17/2010	1:07:38 PM	Helium MFC set to  0.000000
2/17/2010	1:07:38 PM	H2 MFC set to  500.000000
2/17/2010	1:07:38 PM	BCl3 MFC set to  0.000000
2/17/2010	1:07:38 PM	SiCl4 MFC set to  0.000000
2/17/2010	1:07:38 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:07:38 PM	Tube furnace set to 0
2/17/2010	1:07:38 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:27:39 PM	Helium valve closed
2/17/2010	1:27:39 PM	BCl3 valve closed
2/17/2010	1:27:39 PM	PH3 valve closed
2/17/2010	1:27:39 PM	Main Vac valve closed
2/17/2010	1:27:39 PM	Bypass valve closed
2/17/2010	1:27:39 PM	H2 valve opened
2/17/2010	1:27:39 PM	SiCl4 pre valve opened
2/17/2010	1:27:39 PM	SiCl4 post valve opened
2/17/2010	1:27:39 PM	Bubbler valve opened
2/17/2010	1:27:39 PM	Helium MFC set to  0.000000
2/17/2010	1:27:39 PM	H2 MFC set to  500.000000
2/17/2010	1:27:39 PM	BCl3 MFC set to  0.000000
2/17/2010	1:27:39 PM	SiCl4 MFC set to  325.000000
2/17/2010	1:27:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:27:39 PM	Tube furnace set to 0
2/17/2010	1:27:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:47:39 PM	H2 valve closed
2/17/2010	1:47:39 PM	BCl3 valve closed
2/17/2010	1:47:39 PM	PH3 valve closed
2/17/2010	1:47:39 PM	SiCl4 pre valve closed
2/17/2010	1:47:39 PM	SiCl4 post valve closed
2/17/2010	1:47:39 PM	Main Vac valve closed
2/17/2010	1:47:39 PM	Bypass valve closed
2/17/2010	1:47:39 PM	Helium valve opened
2/17/2010	1:47:39 PM	Bubbler valve opened
2/17/2010	1:47:39 PM	Helium MFC set to  500.000000
2/17/2010	1:47:39 PM	H2 MFC set to  0.000000
2/17/2010	1:47:39 PM	BCl3 MFC set to  0.000000
2/17/2010	1:47:39 PM	SiCl4 MFC set to  0.000000
2/17/2010	1:47:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	1:47:39 PM	Tube furnace set to 0
2/17/2010	1:47:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	2:07:39 PM	Helium valve closed
2/17/2010	2:07:39 PM	H2 valve closed
2/17/2010	2:07:39 PM	BCl3 valve closed
2/17/2010	2:07:39 PM	PH3 valve closed
2/17/2010	2:07:39 PM	SiCl4 pre valve closed
2/17/2010	2:07:39 PM	SiCl4 post valve closed
2/17/2010	2:07:39 PM	Main Vac valve closed
2/17/2010	2:07:39 PM	Bypass valve closed
2/17/2010	2:07:39 PM	Bubbler valve closed
2/17/2010	2:07:39 PM	Helium MFC set to  0.000000
2/17/2010	2:07:39 PM	H2 MFC set to  0.000000
2/17/2010	2:07:39 PM	BCl3 MFC set to  0.000000
2/17/2010	2:07:39 PM	SiCl4 MFC set to  0.000000
2/17/2010	2:07:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	2:07:39 PM	Tube furnace set to 0
2/17/2010	2:07:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	2:07:40 PM	Run finished at 2:07 PM
2/17/2010	3:13:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2010	3:13:01 PM	Helium valve closed
2/17/2010	3:13:01 PM	H2 valve closed
2/17/2010	3:13:01 PM	BCl3 valve closed
2/17/2010	3:13:01 PM	PH3 valve closed
2/17/2010	3:13:01 PM	SiCl4 pre valve closed
2/17/2010	3:13:01 PM	SiCl4 post valve closed
2/17/2010	3:13:01 PM	Main Vac valve closed
2/17/2010	3:13:01 PM	Bubbler valve closed
2/17/2010	3:13:01 PM	Bypass valve opened
2/17/2010	3:13:01 PM	Helium MFC set to  0.000000
2/17/2010	3:13:01 PM	H2 MFC set to  0.000000
2/17/2010	3:13:01 PM	BCl3 MFC set to  0.000000
2/17/2010	3:13:01 PM	SiCl4 MFC set to  0.000000
2/17/2010	3:13:01 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	3:13:01 PM	Tube furnace set to 0
2/17/2010	3:13:01 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	3:13:32 PM	Helium valve closed
2/17/2010	3:13:32 PM	H2 valve closed
2/17/2010	3:13:32 PM	BCl3 valve closed
2/17/2010	3:13:32 PM	PH3 valve closed
2/17/2010	3:13:32 PM	SiCl4 pre valve closed
2/17/2010	3:13:32 PM	SiCl4 post valve closed
2/17/2010	3:13:32 PM	Bubbler valve closed
2/17/2010	3:13:32 PM	Main Vac valve opened
2/17/2010	3:13:32 PM	Bypass valve opened
2/17/2010	3:13:32 PM	Helium MFC set to  0.000000
2/17/2010	3:13:32 PM	H2 MFC set to  0.000000
2/17/2010	3:13:32 PM	BCl3 MFC set to  0.000000
2/17/2010	3:13:32 PM	SiCl4 MFC set to  0.000000
2/17/2010	3:13:32 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	3:13:32 PM	Tube furnace set to 0
2/17/2010	3:13:32 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	3:13:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2010	3:15:50 PM	Bypass valve closed
2/17/2010	3:15:50 PM	Main Vac valve closed
2/17/2010	3:15:54 PM	Main Vac valve opened
2/17/2010	3:15:55 PM	Bypass valve opened
2/17/2010	3:15:56 PM	Helium valve opened
2/17/2010	3:15:59 PM	Helium MFC set to  100.000000
2/17/2010	3:16:38 PM	Program exited cleanly
2/17/2010	3:17:59 PM	Program started normally
2/17/2010	3:17:59 PM	Helium valve closed
2/17/2010	3:17:59 PM	H2 valve closed
2/17/2010	3:17:59 PM	BCl3 valve closed
2/17/2010	3:17:59 PM	PH3 valve closed
2/17/2010	3:17:59 PM	SiCl4 pre valve closed
2/17/2010	3:17:59 PM	SiCl4 post valve closed
2/17/2010	3:17:59 PM	Main Vac valve closed
2/17/2010	3:17:59 PM	Bypass valve closed
2/17/2010	3:17:59 PM	Bubbler valve closed
2/17/2010	3:17:59 PM	Helium MFC set to  0.000000
2/17/2010	3:17:59 PM	H2 MFC set to  0.000000
2/17/2010	3:17:59 PM	BCl3 MFC set to  0.000000
2/17/2010	3:18:00 PM	SiCl4 MFC set to  0.000000
2/17/2010	3:18:00 PM	Bypass solenoid MFC set to  760.000000
2/17/2010	3:18:00 PM	Tube furnace set to 0
2/17/2010	3:18:00 PM	Bypass solenoid MFC set to  760.000000
2/17/2010	3:18:02 PM	Bypass valve opened
2/17/2010	3:18:03 PM	Main Vac valve opened
2/17/2010	3:18:51 PM	Bypass valve closed
2/17/2010	3:18:52 PM	Main Vac valve closed
2/17/2010	3:18:59 PM	Main Vac valve opened
2/17/2010	3:19:00 PM	Bypass valve opened
2/17/2010	3:19:50 PM	Recipe started at 3:19 PM
2/17/2010	3:19:50 PM	Helium valve closed
2/17/2010	3:19:50 PM	BCl3 valve closed
2/17/2010	3:19:50 PM	PH3 valve closed
2/17/2010	3:19:50 PM	SiCl4 pre valve closed
2/17/2010	3:19:50 PM	SiCl4 post valve closed
2/17/2010	3:19:50 PM	Main Vac valve closed
2/17/2010	3:19:50 PM	Bypass valve closed
2/17/2010	3:19:50 PM	Bubbler valve closed
2/17/2010	3:19:50 PM	H2 valve opened
2/17/2010	3:19:50 PM	Helium MFC set to  0.000000
2/17/2010	3:19:50 PM	H2 MFC set to  500.000000
2/17/2010	3:19:50 PM	BCl3 MFC set to  0.000000
2/17/2010	3:19:50 PM	SiCl4 MFC set to  0.000000
2/17/2010	3:19:50 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	3:19:50 PM	Tube furnace set to 0
2/17/2010	3:19:50 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	3:21:12 PM	Helium valve closed
2/17/2010	3:21:12 PM	BCl3 valve closed
2/17/2010	3:21:12 PM	PH3 valve closed
2/17/2010	3:21:12 PM	SiCl4 pre valve closed
2/17/2010	3:21:12 PM	SiCl4 post valve closed
2/17/2010	3:21:12 PM	Main Vac valve closed
2/17/2010	3:21:12 PM	Bypass valve closed
2/17/2010	3:21:12 PM	H2 valve opened
2/17/2010	3:21:12 PM	Bubbler valve opened
2/17/2010	3:21:12 PM	Helium MFC set to  0.000000
2/17/2010	3:21:12 PM	H2 MFC set to  500.000000
2/17/2010	3:21:12 PM	BCl3 MFC set to  0.000000
2/17/2010	3:21:12 PM	SiCl4 MFC set to  0.000000
2/17/2010	3:21:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	3:21:12 PM	Tube furnace set to 0
2/17/2010	3:21:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	3:41:13 PM	Helium valve closed
2/17/2010	3:41:13 PM	BCl3 valve closed
2/17/2010	3:41:13 PM	PH3 valve closed
2/17/2010	3:41:13 PM	Main Vac valve closed
2/17/2010	3:41:13 PM	Bypass valve closed
2/17/2010	3:41:13 PM	H2 valve opened
2/17/2010	3:41:13 PM	SiCl4 pre valve opened
2/17/2010	3:41:13 PM	SiCl4 post valve opened
2/17/2010	3:41:13 PM	Bubbler valve opened
2/17/2010	3:41:13 PM	Helium MFC set to  0.000000
2/17/2010	3:41:13 PM	H2 MFC set to  500.000000
2/17/2010	3:41:13 PM	BCl3 MFC set to  0.000000
2/17/2010	3:41:13 PM	SiCl4 MFC set to  325.000000
2/17/2010	3:41:13 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	3:41:13 PM	Tube furnace set to 0
2/17/2010	3:41:13 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	4:01:13 PM	H2 valve closed
2/17/2010	4:01:13 PM	BCl3 valve closed
2/17/2010	4:01:13 PM	PH3 valve closed
2/17/2010	4:01:13 PM	SiCl4 pre valve closed
2/17/2010	4:01:13 PM	SiCl4 post valve closed
2/17/2010	4:01:13 PM	Main Vac valve closed
2/17/2010	4:01:13 PM	Bypass valve closed
2/17/2010	4:01:13 PM	Helium valve opened
2/17/2010	4:01:13 PM	Bubbler valve opened
2/17/2010	4:01:13 PM	Helium MFC set to  500.000000
2/17/2010	4:01:13 PM	H2 MFC set to  0.000000
2/17/2010	4:01:13 PM	BCl3 MFC set to  0.000000
2/17/2010	4:01:13 PM	SiCl4 MFC set to  0.000000
2/17/2010	4:01:13 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	4:01:13 PM	Tube furnace set to 0
2/17/2010	4:01:13 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	4:21:14 PM	Helium valve closed
2/17/2010	4:21:14 PM	H2 valve closed
2/17/2010	4:21:14 PM	BCl3 valve closed
2/17/2010	4:21:14 PM	PH3 valve closed
2/17/2010	4:21:14 PM	SiCl4 pre valve closed
2/17/2010	4:21:14 PM	SiCl4 post valve closed
2/17/2010	4:21:14 PM	Main Vac valve closed
2/17/2010	4:21:14 PM	Bypass valve closed
2/17/2010	4:21:14 PM	Bubbler valve closed
2/17/2010	4:21:14 PM	Helium MFC set to  0.000000
2/17/2010	4:21:14 PM	H2 MFC set to  0.000000
2/17/2010	4:21:14 PM	BCl3 MFC set to  0.000000
2/17/2010	4:21:14 PM	SiCl4 MFC set to  0.000000
2/17/2010	4:21:14 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	4:21:14 PM	Tube furnace set to 0
2/17/2010	4:21:14 PM	Bypass solenoid MFC set to  0.000000
2/17/2010	4:21:14 PM	Run finished at 4:21 PM
2/17/2010	4:44:03 PM	Program exited cleanly
2/17/10	4:50:19 PM	Program started normally
2/17/10	4:50:20 PM	Helium valve closed
2/17/10	4:50:20 PM	H2 valve closed
2/17/10	4:50:20 PM	BCl3 valve closed
2/17/10	4:50:20 PM	PH3 valve closed
2/17/10	4:50:20 PM	SiCl4 pre valve closed
2/17/10	4:50:20 PM	SiCl4 post valve closed
2/17/10	4:50:20 PM	Main Vac valve closed
2/17/10	4:50:20 PM	Bypass valve closed
2/17/10	4:50:20 PM	Bubbler valve closed
2/17/10	4:50:20 PM	Helium MFC set to  0.000000
2/17/10	4:50:20 PM	H2 MFC set to  0.000000
2/17/10	4:50:20 PM	BCl3 MFC set to  0.000000
2/17/10	4:50:20 PM	SiCl4 MFC set to  0.000000
2/17/10	4:50:20 PM	Bypass solenoid MFC set to  760.000000
2/17/10	4:50:20 PM	Tube furnace set to 0
2/17/10	4:50:20 PM	Bypass solenoid MFC set to  760.000000
2/17/10	4:50:28 PM	Program exited cleanly
2/17/10	6:36:39 PM	Program started normally
2/17/10	6:36:40 PM	Helium valve closed
2/17/10	6:36:40 PM	H2 valve closed
2/17/10	6:36:40 PM	BCl3 valve closed
2/17/10	6:36:40 PM	PH3 valve closed
2/17/10	6:36:40 PM	SiCl4 pre valve closed
2/17/10	6:36:40 PM	SiCl4 post valve closed
2/17/10	6:36:40 PM	Main Vac valve closed
2/17/10	6:36:40 PM	Bypass valve closed
2/17/10	6:36:40 PM	Bubbler valve closed
2/17/10	6:36:40 PM	Helium MFC set to  0.000000
2/17/10	6:36:40 PM	H2 MFC set to  0.000000
2/17/10	6:36:40 PM	BCl3 MFC set to  0.000000
2/17/10	6:36:40 PM	SiCl4 MFC set to  0.000000
2/17/10	6:36:40 PM	Bypass solenoid MFC set to  760.000000
2/17/10	6:36:40 PM	Tube furnace set to 0
2/17/10	6:36:41 PM	Helium valve opened
2/17/10	6:36:42 PM	Helium valve closed
2/17/10	6:36:43 PM	Helium valve opened
2/17/10	6:36:44 PM	Helium valve closed
2/17/10	6:37:10 PM	Helium valve opened
2/17/10	6:37:19 PM	Program exited cleanly
2/17/10	11:33:36 PM	Program started normally
2/17/10	11:33:37 PM	Helium valve closed
2/17/10	11:33:37 PM	H2 valve closed
2/17/10	11:33:37 PM	BCl3 valve closed
2/17/10	11:33:37 PM	PH3 valve closed
2/17/10	11:33:37 PM	SiCl4 pre valve closed
2/17/10	11:33:37 PM	SiCl4 post valve closed
2/17/10	11:33:37 PM	Main Vac valve closed
2/17/10	11:33:37 PM	Bypass valve closed
2/17/10	11:33:37 PM	Bubbler valve closed
2/17/10	11:33:37 PM	Helium MFC set to  0.000000
2/17/10	11:33:37 PM	H2 MFC set to  0.000000
2/17/10	11:33:37 PM	BCl3 MFC set to  0.000000
2/17/10	11:33:37 PM	SiCl4 MFC set to  0.000000
2/17/10	11:33:37 PM	Bypass solenoid MFC set to  760.000000
2/17/10	11:33:37 PM	Tube furnace set to 0
2/17/10	11:33:51 PM	Program exited cleanly
2/17/10	11:35:26 PM	Program started normally
2/17/10	11:35:26 PM	Helium valve closed
2/17/10	11:35:26 PM	H2 valve closed
2/17/10	11:35:26 PM	BCl3 valve closed
2/17/10	11:35:26 PM	PH3 valve closed
2/17/10	11:35:26 PM	SiCl4 pre valve closed
2/17/10	11:35:26 PM	SiCl4 post valve closed
2/17/10	11:35:26 PM	Main Vac valve closed
2/17/10	11:35:26 PM	Bypass valve closed
2/17/10	11:35:26 PM	Bubbler valve closed
2/17/10	11:35:26 PM	Helium MFC set to  0.000000
2/17/10	11:35:26 PM	H2 MFC set to  0.000000
2/17/10	11:35:26 PM	BCl3 MFC set to  0.000000
2/17/10	11:35:26 PM	SiCl4 MFC set to  0.000000
2/17/10	11:35:26 PM	Bypass solenoid MFC set to  760.000000
2/17/10	11:35:26 PM	Tube furnace set to 0
2/17/10	11:35:34 PM	Program exited cleanly
2/17/10	11:36:38 PM	Program started normally
2/17/10	11:36:39 PM	Helium valve closed
2/17/10	11:36:39 PM	H2 valve closed
2/17/10	11:36:39 PM	BCl3 valve closed
2/17/10	11:36:39 PM	PH3 valve closed
2/17/10	11:36:39 PM	SiCl4 pre valve closed
2/17/10	11:36:39 PM	SiCl4 post valve closed
2/17/10	11:36:39 PM	Main Vac valve closed
2/17/10	11:36:39 PM	Bypass valve closed
2/17/10	11:36:39 PM	Bubbler valve closed
2/17/10	11:36:39 PM	Helium MFC set to  0.000000
2/17/10	11:36:39 PM	H2 MFC set to  0.000000
2/17/10	11:36:39 PM	BCl3 MFC set to  0.000000
2/17/10	11:36:39 PM	SiCl4 MFC set to  0.000000
2/17/10	11:36:39 PM	Bypass solenoid MFC set to  760.000000
2/17/10	11:36:39 PM	Tube furnace set to 0
2/17/10	11:36:39 PM	Helium valve opened
2/17/10	11:36:40 PM	Helium valve closed
2/17/10	11:36:40 PM	H2 valve opened
2/17/10	11:36:41 PM	H2 valve closed
2/17/10	11:36:42 PM	BCl3 valve opened
2/17/10	11:36:42 PM	BCl3 valve closed
2/17/10	11:36:43 PM	PH3 valve opened
2/17/10	11:36:43 PM	PH3 valve closed
2/17/10	11:36:46 PM	Program exited cleanly
2/17/10	11:38:12 PM	Program started normally
2/17/10	11:38:12 PM	Helium valve closed
2/17/10	11:38:12 PM	H2 valve closed
2/17/10	11:38:12 PM	BCl3 valve closed
2/17/10	11:38:12 PM	PH3 valve closed
2/17/10	11:38:12 PM	SiCl4 pre valve closed
2/17/10	11:38:12 PM	SiCl4 post valve closed
2/17/10	11:38:12 PM	Main Vac valve closed
2/17/10	11:38:12 PM	Bypass valve closed
2/17/10	11:38:12 PM	Bubbler valve closed
2/17/10	11:38:12 PM	Helium MFC set to  0.000000
2/17/10	11:38:12 PM	H2 MFC set to  0.000000
2/17/10	11:38:12 PM	BCl3 MFC set to  0.000000
2/17/10	11:38:12 PM	SiCl4 MFC set to  0.000000
2/17/10	11:38:12 PM	Bypass solenoid MFC set to  760.000000
2/17/10	11:38:12 PM	Tube furnace set to 0
2/17/10	11:38:13 PM	Helium valve opened
2/17/10	11:38:13 PM	Helium valve closed
2/17/10	11:38:14 PM	H2 valve opened
2/17/10	11:38:14 PM	H2 valve closed
2/17/10	11:38:15 PM	BCl3 valve opened
2/17/10	11:38:15 PM	BCl3 valve closed
2/17/10	11:38:16 PM	PH3 valve opened
2/17/10	11:38:16 PM	PH3 valve closed
2/17/10	11:38:17 PM	SiCl4 pre valve opened
2/17/10	11:38:17 PM	SiCl4 pre valve closed
2/17/10	11:38:18 PM	SiCl4 post valve opened
2/17/10	11:38:19 PM	SiCl4 post valve closed
2/17/10	11:38:20 PM	Bypass valve opened
2/17/10	11:38:20 PM	Bypass valve closed
2/17/10	11:38:21 PM	Bubbler valve opened
2/17/10	11:38:23 PM	Bypass valve opened
2/17/10	11:38:24 PM	Bypass valve closed
2/17/10	11:38:25 PM	Bubbler valve closed
2/17/10	11:38:42 PM	Program exited cleanly
2/17/10	11:40:43 PM	Program started normally
2/17/10	11:40:43 PM	Helium valve closed
2/17/10	11:40:43 PM	H2 valve closed
2/17/10	11:40:43 PM	BCl3 valve closed
2/17/10	11:40:43 PM	PH3 valve closed
2/17/10	11:40:43 PM	SiCl4 pre valve closed
2/17/10	11:40:44 PM	SiCl4 post valve closed
2/17/10	11:40:44 PM	Main Vac valve closed
2/17/10	11:40:44 PM	Bypass valve closed
2/17/10	11:40:44 PM	Bubbler valve closed
2/17/10	11:40:44 PM	Helium MFC set to  0.000000
2/17/10	11:40:44 PM	H2 MFC set to  0.000000
2/17/10	11:40:44 PM	BCl3 MFC set to  0.000000
2/17/10	11:40:44 PM	SiCl4 MFC set to  0.000000
2/17/10	11:40:44 PM	Bypass solenoid MFC set to  760.000000
2/17/10	11:40:44 PM	Tube furnace set to 0
2/17/10	11:41:05 PM	Program exited cleanly
